Plasma dry cleaner, plasma cleaner, plasma cleaning device.
A plasma cleaner that can be customized to meet your needs.
- Tabletop, low-cost, high-performance type - Usable from experimental to full-scale production - RIE mode standard (DP mode switch is optional) - Equipped with two mass flow meters for argon and oxygen - Standard oil rotary pump included We also customize based on standard models to meet customer requirements. Our company offers a wide range of products from small batch systems to medium and large batch systems, as well as various automated machines. The chamber structure supports a variety of types, including quartz barrels, parallel plates, and load-lock types. We also provide atmospheric pressure plasma options.
- 企業：ヤマトマテリアル
- 価格：Other
